32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry

We report on a 32 × silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The is fabricated 200-mm silicon-on-insulator wafers in commercial complementary metal-oxide-semiconductor (CMOS) foundry. device has maximum on-chip loss of 7.7 dB and an extinction ratio 50.8 dB. switching voltage 9.45 V the 20-dB bandwidth 28.7 nm. Our work shows promising path for mass production MEMS switches CMOS foundries.